JOURNAL ARTICLE
High-Performance MIM Capacitors based on TiO2/ZrO2/TiO2 and AlO-doped TiO2/ZrO2/TiO2 Dielectric Stacks for DRAM Applications
Revathy PadmanabhanNavakanta BhatS. MohanYuichiro MorozumiSanjeev Kaushal
Year: 2013 Journal: MRS Proceedings Vol: 1561 Publisher: Cambridge University Press
Keywords:
Materials science Capacitor Dielectric Capacitance Dram High-κ dielectric Doping Optoelectronics Voltage Electrical engineering Electrode
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Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Ferroelectric and Negative Capacitance Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Memory and Neural Computing
Physical Sciences → Engineering → Electrical and Electronic Engineering
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