Micromilling of metal alloys with focused ion beam–fabricated tools

David P. Adams; M. J. Vasile; Gilbert L. Benavides; A. N. Campbell

doi:10.1016/s0141-6359(00)00064-7

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Micromilling of metal alloys with focused ion beam–fabricated tools

David P. Adams M. J. Vasile Gilbert L. Benavides A. N. Campbell

Year: 2001 Journal: Precision Engineering Vol: 25 (2)Pages: 107-113 Publisher: Elsevier BV

DOI: 10.1016/s0141-6359(00)00064-7

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Keywords:

Materials science Brass Tungsten carbide Machining Sputtering End mill Enhanced Data Rates for GSM Evolution Focused ion beam Trench Drilling Ion beam Metallurgy Surface micromachining Beam (structure) Composite material Optics Ion Nanotechnology Thin film Copper Computer science Fabrication

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Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Micromilling of metal alloys with focused ion beam–fabricated tools

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