JOURNAL ARTICLE

Micromilling of metal alloys with focused ion beam–fabricated tools

Keywords:
Materials science Brass Tungsten carbide Machining Sputtering End mill Enhanced Data Rates for GSM Evolution Focused ion beam Trench Drilling Ion beam Metallurgy Surface micromachining Beam (structure) Composite material Optics Ion Nanotechnology Thin film Copper Computer science Fabrication

Metrics

131
Cited By
4.02
FWCI (Field Weighted Citation Impact)
22
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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