JOURNAL ARTICLE

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi EsashiShuichi ShojiAkira Nakano

Year: 1989 Journal:   Sensors and Actuators Vol: 20 (1-2)Pages: 163-169   Publisher: Elsevier BV
Keywords:
Micropump Materials science Wafer Diaphragm (acoustics) Silicon Volumetric flow rate Optoelectronics Nanotechnology Electrical engineering Engineering

Metrics

151
Cited By
7.39
FWCI (Field Weighted Citation Impact)
4
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Microfluidic and Capillary Electrophoresis Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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