Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1016/0250-6874(89)87114-8

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Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi Shuichi Shoji Akira Nakano

Year: 1989 Journal: Sensors and Actuators Vol: 20 (1-2)Pages: 163-169 Publisher: Elsevier BV

DOI: 10.1016/0250-6874(89)87114-8

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Keywords:

Micropump Materials science Wafer Diaphragm (acoustics) Silicon Volumetric flow rate Optoelectronics Nanotechnology Electrical engineering Engineering

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Microfluidic and Capillary Electrophoresis Applications

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Normally closed microvalve and mircopump fabricated on a silicon wafer

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