Magnetic properties of Fe-Al-Si/Fe multilayer films.

Abstract

This paper reports magnetic properties of Fe-Al-Si/Fe multilayer films prepared by a RF sputtering equipment. The Fe-Al-Si/Fe multilayer films without annealing have high saturation magnetic flux density of 16 kG and initial permeability of more than 1000, even though Fe-Al-Si single layer films have less than 500. Fe and Fe-Al-Si single layer films with the thickness below 1000Å have good soft magnetic properties without annealing. The soft magnetic properties of the multilayer films are improved by annealing as the internal stress can be relieved. The thinner the thickness of each layer, the better the soft magnetic properties become. The Fe-Al-Si (50Å)/Fe (50Å) multilayer film annealed at 400∼450°C exhibits a low coercivity of 0.7 Oe and a high initial permeability of 4000.