Silicon Nanowire Electromechanical Switch for Logic Device Application

Qiliang Li; Sang‐Mo Koo; Monica D. Edelstein; John S. Suehle; Curt A. Richter

doi:10.1557/proc-1018-ee09-07

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Silicon Nanowire Electromechanical Switch for Logic Device Application

Qiliang Li Sang‐Mo Koo Monica D. Edelstein John S. Suehle Curt A. Richter

Year: 2007 Journal: MRS Proceedings Vol: 1018 Publisher: Cambridge University Press

DOI: 10.1557/proc-1018-ee09-07

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Keywords:

Materials science Nanowire Fabrication Electrode Optoelectronics Silicon nanowires Voltage Subthreshold slope Transistor Nanotechnology Field-effect transistor Electrical engineering

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Topics

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanowire Electromechanical Switch for Logic Device Application

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