Capacitive Pressure Sensor Modelling

Abstract

The paper deals with an application theory of elasticity in the capacitive pressure sensor. A basis of this paper has been focused to the elastic part of the described model. This model has a second part which is used for solving of electric field and electric capacity. Calculations of deformations of a silicon membrane are modeled as a three dimensional model with distribution corresponding to density gradients. It is segmented according to this elasticity distribution. Simulation consists of simulating elastic-plastic deformation by displacing the internal model points of the used model grid in the direction of the deformations. This model calculates stress forces for controlling that the parameters of simulations are in ranges of elastic deformations which was limited by value of the stress force. In the next step the model solves an electric field model and solves an electrical capacity on the deformed structure.