Remote RF powering system for wireless MEMS strain sensors

Abstract

A reliable remote radio frequency (RF) powering system is developed for industrial wireless microelectromechanical systems (MEMS) strain-sensing applications. The prototype system is insensitive to mechanical rotation and produces a stable DC voltage of 2.8 V with a 2-mA current supply capability from a 50-MHz RF power source with a power conversion efficiency of 11%. An improved efficiency can be expected with an optimized power transmitter design. The CMOS power converter electronics are fabricated in a 1.5-/spl mu/m CMOS process occupying an area of approximately 1 /spl times/1 mm. The achieved DC power is adequate for supplying a high-performance wireless MEMS strain-sensing system.