MEMS-based humidity sensor with integrated temperature compensation mechanism

Lung-Tai Chen; Chia‐Yen Lee; Wood-Hi Cheng

doi:10.1016/j.sna.2008.06.033

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MEMS-based humidity sensor with integrated temperature compensation mechanism

Lung-Tai Chen Chia‐Yen Lee Wood-Hi Cheng

Year: 2008 Journal: Sensors and Actuators A Physical Vol: 147 (2)Pages: 522-528 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2008.06.033

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Keywords:

Polyimide Materials science Humidity Cantilever Microelectromechanical systems Relative humidity Resistive touchscreen Silicon nitride Layer (electronics) Resistor Substrate (aquarium) Optoelectronics Composite material Silicon Electrical engineering Voltage Meteorology

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

MEMS-based humidity sensor with integrated temperature compensation mechanism

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