Superhard NbB2− thin films deposited by dc magnetron sputtering

Nils Nedfors; Olof Tengstrand; Jun Lu; Per Eklund; Per O. Å. Persson; Lars Hultman; Ulf Jansson

doi:10.1016/j.surfcoat.2014.07.087

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Superhard NbB2− thin films deposited by dc magnetron sputtering

Nils Nedfors Olof Tengstrand Jun Lu Per Eklund Per O. Å. Persson Lars Hultman Ulf Jansson

Year: 2014 Journal: Surface and Coatings Technology Vol: 257 Pages: 295-300 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2014.07.087

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Keywords:

Materials science Thin film Sputter deposition Nucleation Sputtering X-ray photoelectron spectroscopy Grain boundary Transmission electron microscopy Scanning electron microscope Composite material Analytical Chemistry (journal) Metallurgy Microstructure Nanotechnology Chemical engineering Thermodynamics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Superhard NbB2− thin films deposited by dc magnetron sputtering

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