Vertically aligned graphene nanosheets on silicon using an ionic liquid electrolyte: towards high performance on-chip micro-supercapacitors

David Aradilla; M. Delaunay; Saı̈d Sadki; Jean‐Michel Gérard; Gérard Bidan

doi:10.1039/c5ta04578a

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Vertically aligned graphene nanosheets on silicon using an ionic liquid electrolyte: towards high performance on-chip micro-supercapacitors

David Aradilla M. Delaunay Saı̈d Sadki Jean‐Michel Gérard Gérard Bidan

Year: 2015 Journal: Journal of Materials Chemistry A Vol: 3 (38)Pages: 19254-19262 Publisher: Royal Society of Chemistry

DOI: 10.1039/c5ta04578a

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Abstract

Vertically oriented graphene nanosheets were synthesized by an alternative and simple approach based on electron cyclotron resonance-plasma enhanced chemical vapor deposition (ECR-CVD) onto highly doped silicon substrates.

Keywords:

Materials science Supercapacitor Graphene Chemical vapor deposition Electron cyclotron resonance Ionic liquid Silicon Electrolyte Nanotechnology Doping Deposition (geology) Optoelectronics Chemical engineering Electrochemistry Ion Electrode Chemistry

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Supercapacitor Materials and Fabrication

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Advancements in Battery Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Graphene research and applications

Physical Sciences → Materials Science → Materials Chemistry

Vertically aligned graphene nanosheets on silicon using an ionic liquid electrolyte: towards high performance on-chip micro-supercapacitors

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