JOURNAL ARTICLE

Process Development and Integration of Piezoelectric Aluminum Nitride Thin-Film for RF MEMS Applications

R.K. SharmaJiang NingHanhua FengR. Gopalakrishnan

Year: 2002 Journal:   MRS Proceedings Vol: 741   Publisher: Cambridge University Press
Keywords:
Materials science Nitride Stoichiometry Microelectromechanical systems Thin film Substrate (aquarium) Argon Optoelectronics Aluminium Sputtering Dry etching Etching (microfabrication) Analytical Chemistry (journal) Layer (electronics) Nanotechnology Composite material

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Topics

Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
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