Compliant Carbon Nanotube-Metal Contact Structures

Abstract

This paper discusses a method to fabricate contact structures using carbon nanotubes (CNTs) and thin film metal deposition which can be used in applications such as electromechanical probes. We discuss the electrical resistance of CNT structures and electrical enhancement schemes using various metal deposition techniques including sputtering and electroless metal plating. Functional CNT-metal composite contact structures are demonstrated and test results, along with failure mechanisms are discussed. We also discuss factors affecting mechanical compliance, electrical resistance and trade offs between them.