JOURNAL ARTICLE

Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride from Novel Organosilanes

J. M. GrowR. LévyYoseb YuK. Shih

Year: 1994 Journal:   MRS Proceedings Vol: 344   Publisher: Cambridge University Press
Keywords:
Materials science Chemical vapor deposition Silicon nitride Plasma-enhanced chemical vapor deposition Chemical engineering Carbon nitride Deposition (geology) Modulus Plasma processing Silicon Carbon film Carbon fibers Combustion chemical vapor deposition Nitride Thin film Analytical Chemistry (journal) Plasma Composite material Nanotechnology Metallurgy Organic chemistry Layer (electronics) Composite number Chemistry

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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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