Microwave glow discharge deposition of thin silicon nitride films

Milan Růžička

doi:10.1007/bf01594082

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Microwave glow discharge deposition of thin silicon nitride films

Milan Růžička

Year: 1974 Journal: Czechoslovak Journal of Physics Vol: 24 (4)Pages: 465-468 Publisher: Springer Science+Business Media

DOI: 10.1007/bf01594082

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Keywords:

Materials science Glow discharge Silicon nitride Thin film Microwave Optoelectronics Deposition (geology) Silicon Nitride Plasma Nanotechnology Layer (electronics) Computer science Physics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Microwave glow discharge deposition of thin silicon nitride films

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