Synthesis of Electro-Statically Actuated MEMS

Wenjing Ye; Subrata Mukherjee

doi:10.1007/978-1-4615-0487-0_3

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Synthesis of Electro-Statically Actuated MEMS

Wenjing Ye Subrata Mukherjee

Year: 2003 Microsystems Pages: 43-77 Publisher: Springer Nature

DOI: 10.1007/978-1-4615-0487-0_3

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Keywords:

Sensitivity (control systems) Microelectromechanical systems Quadratic equation Inverse Boundary element method Comb drive Process (computing) Function (biology) Finite element method Control theory (sociology) Computer science Variable (mathematics) Mechanical engineering Control engineering Engineering Structural engineering Mathematics Electronic engineering Materials science Nanotechnology Mathematical analysis Geometry

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Synthesis of Electro-Statically Actuated MEMS

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