YBa2Cu3O7-x thin films deposition on YSZ substrates by MOCVD

José Santiso; António Figueras

doi:10.1051/jp4:1993348

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YBa₂Cu₃O_7-x thin films deposition on YSZ substrates by MOCVD

José Santiso António Figueras

Year: 1993 Journal: Journal de Physique IV (Proceedings) Vol: 03 (C3)Pages: C3-353 Publisher: Springer Science+Business Media

DOI: 10.1051/jp4:1993348

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Abstract

The evaporation process of β-diketonate precursors for the MOCVD deposition of YBa2Cu3O7-x superconducting films has been investigated by thermogravimetric analysis. Special attention has been paid to the Ba(thd)2 precursor. A simple model of the reactions involved in this process has been described. YBa2Cu3O7-x superconducting layes were deposited on YSZ substrates by MOCVD in a horizontal hot-wall reactor. Films showed a mixture of c-axis and a-axis orientation and have a Tc(R=0)=88.2K and Tc onset=91.6K

Keywords:

Metalorganic vapour phase epitaxy Chemical vapor deposition Yttria-stabilized zirconia Superconductivity Materials science Thin film Thermogravimetric analysis Evaporation Deposition (geology) High-temperature superconductivity Analytical Chemistry (journal) Mineralogy Crystallography Chemistry Nanotechnology Epitaxy Condensed matter physics Composite material Physics Geology Layer (electronics) Organic chemistry

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Physical Sciences → Materials Science → Surfaces, Coatings and Films

YBa₂Cu₃O_7-x thin films deposition on YSZ substrates by MOCVD

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