High performance hard carbon coatings (diamond‐like coatings)

Abstract

Abstract Different dLc coating types are applied at an industrial scale by sulzer Metco thin Film. The coatings are generated with different coating architecture. Deposition methods are: magnetron sputtering, electron beam evaporation and PA‐cVd. Reactive magnetron sputtering is used to deposit metal containing a‐c:h coatings (a‐c:h:Me), e.g. MAXit W‐ch. Pure a‐c:h coatings as functional top coatings are used for cavidur®, MAXit® AhdLc and special versions of dylyn® coatings. In addition to the pure a‐c:h coatings, doped a‐c:h coatings are also used. The dylyn® family of coatings is comprised of at least one layer a‐c:h:si:O. The dylyn® coatings may be doped with metal (a‐c:h:ti:si:O) to adapt selected properties like electrical conductivity.