Preparation of SrTiO3 thin films by the liquid phase deposition method

Yanfeng Gao; Yoshitake Masuda; Tetsu Yonezawa; Kunihito Koumoto

doi:10.1016/s0921-5107(02)00527-5

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Preparation of SrTiO3 thin films by the liquid phase deposition method

Yanfeng Gao Yoshitake Masuda Tetsu Yonezawa Kunihito Koumoto

Year: 2003 Journal: Materials Science and Engineering B Vol: 99 (1-3)Pages: 290-293 Publisher: Elsevier BV

DOI: 10.1016/s0921-5107(02)00527-5

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Keywords:

Thin film Strontium titanate Materials science X-ray photoelectron spectroscopy Amorphous solid Annealing (glass) Impurity Crystallization Perovskite (structure) Analytical Chemistry (journal) Deposition (geology) Chemical engineering Carbon film Aqueous solution Phase (matter) Substrate (aquarium) Mineralogy Nanotechnology Composite material Crystallography Chemistry Chromatography Organic chemistry

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Preparation of SrTiO3 thin films by the liquid phase deposition method

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