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JOURNAL ARTICLE

Thermal Stability of Fe-Zr/Fe-Zr-N Soft Magnetic Multilayered Films

Hiroki OnoMasashi FujinagaT. YonemotoT. Miyagawa

Year: 1992 Journal:   IEEE Translation Journal on Magnetics in Japan Vol: 7 (11)Pages: 907-911   Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/tjmj.1992.4565528
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Abstract

stract-Fe-Zr/Fe-Zr-N multilayered films were prepared by alternation of Fe-Zr sputtering and electron cyclotron resonance (ECR) plasma nitridation. Thermal stability of the films' soft magnetic properties was investigated. A saturation flux density of B s =1.8 T, coercivity H c =88 A/m and relative permeability μ'≫3000 (at 20 MHz) were obtained for Fe 92 Zr 8 /Fe 92 Zr 8 -N multilayered film after annealing at 773K for 3600 s. Addition of Zr to Fe/Fe-N multilayered films effectively improves the thermal stability of soft magnetic properties.

Keywords:
Thermal stability Materials science Annealing (glass) Analytical Chemistry (journal) Coercivity Nuclear magnetic resonance Physics Chemistry Condensed matter physics Organic chemistry Composite material

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Topics

Metallic Glasses and Amorphous Alloys
Physical Sciences →  Engineering →  Mechanical Engineering
Magnetic properties of thin films
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Magnetic Properties of Alloys
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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