Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation

Shin-ichi Aoqui; K. Ebihara; Tomoaki Ikegami

doi:10.1016/s1359-8368(99)00031-1

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Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation

Shin-ichi Aoqui K. Ebihara Tomoaki Ikegami

Year: 1999 Journal: Composites Part B Engineering Vol: 30 (7)Pages: 691-698 Publisher: Elsevier BV

DOI: 10.1016/s1359-8368(99)00031-1

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Keywords:

Thin film Carbon nitride Materials science Diamond-like carbon Carbon film Excimer laser Hydrogen Laser ablation Analytical Chemistry (journal) Carbon fibers Graphite Pulsed laser deposition Substrate (aquarium) Nitride Laser Nanotechnology Chemistry Optics Composite material Organic chemistry

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Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Analytical chemistry methods development

Physical Sciences → Chemistry → Analytical Chemistry

Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation

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Citation History

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