JOURNAL ARTICLE

Selective chemical etching of hexagonal boron nitride compared to cubic boron nitride

Stephen J. HarrisAnita M. WeinerGary L. DollW. J. Meng

Year: 1997 Journal:   Journal of materials research/Pratt's guide to venture capital sources Vol: 12 (2)Pages: 412-415   Publisher: Springer Nature
Keywords:
Materials science Boron nitride Etching (microfabrication) Hexagonal boron nitride Boron Chemical engineering Fourier transform infrared spectroscopy Isotropic etching Analytical Chemistry (journal) Nanotechnology Layer (electronics) Organic chemistry Chemistry

Metrics

20
Cited By
3.88
FWCI (Field Weighted Citation Impact)
13
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Boron and Carbon Nanomaterials Research
Physical Sciences →  Materials Science →  Materials Chemistry
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