JOURNAL ARTICLE
A solenoid-type inductor with Fe-based soft magnetic thin film for high frequency application
Abstract
Soft FeSiBCuNbCr magnetic thin film was deposited by magnetron sputtering as magnetic core for inductor. In the fabrication process, UV-LIGA, dry etching technique, fine polishing and electroplating technique are adopted. The size of the solenoid-type inductor is 3.9 mm times 2.66 mm. Experimental results show that the inductance keeps constant about 0.9 muH in the frequency range from 1 MHz to 10 MHz, and the maximum quality factor is 2.5 at 9 MHz
Keywords:
Inductor Materials science Inductance Solenoid Sputter deposition Optoelectronics Magnetic core Etching (microfabrication) Sputtering Dry etching Polishing Q factor Fabrication Thin film Electrical engineering Composite material Electromagnetic coil Nanotechnology Engineering Layer (electronics) Resonator
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Topics
Induction Heating and Inverter Technology
Physical Sciences → Engineering → Mechanical Engineering
Electromagnetic Launch and Propulsion Technology
Physical Sciences → Engineering → Aerospace Engineering
Advanced DC-DC Converters
Physical Sciences → Engineering → Electrical and Electronic Engineering
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