A CMOS compatible back end MEMS switch for logic functions

Abstract

In this paper we show that by shrinking MEMS switches to sub-micron thickness and a few microns in lateral dimension, they can be encapsulated in the dielectric spacer between the metallization of a back end CMOS process. By making zero restoring force rocker switches in addition to more traditional cantilever based switches we demonstrate that by coupling several switches together logic functions can be performed. We discuss how coupled MEMS switches could be used for logic and FPGA functions and show that these switches work up to 400°C.