Platinum‐Containing Diamond‐like Carbon Thin Films

Abstract

This paper reports a composite thin film of platinum–diamond‐like carbon (Pt‐DLC). “Nonreactive” and reactive rf sputter deposition techniques were used for the preparation of these thin films under various ratios of Ar/CH 4 . As‐deposited thin films were characterized for microstructures using transmission electron microscopy and Raman spectroscopy, compositions using electron probe for microanalysis, surface morphology using scanning electron microscopy, and sheet resistance using four‐point probe. Correlations among the growth parameter, film composition, and structure are presented. Such correlations were found to depend on the deposition technique. Improved electrical conductivity and reduced film stress were also found due to the addition of platinum to DLC.