Epitaxial growth of Co/Cu[100] and [111] superlattices via rf sputtering on sapphire (11<ovl>2</ovl>0)-substrates

Ch. Morawe; A. Abromeit; Naoto Metoki; P. Sonntag; H. Zabel

doi:10.1557/jmr.1994.0570

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Epitaxial growth of Co/Cu[100] and [111] superlattices via rf sputtering on sapphire (1120)-substrates

Ch. Morawe A. Abromeit Naoto Metoki P. Sonntag H. Zabel

Year: 1994 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 9 (3)Pages: 570-581 Publisher: Springer Nature

DOI: 10.1557/jmr.1994.0570

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Keywords:

Materials science Epitaxy Sapphire Sputtering Superlattice Transmission electron microscopy Scanning electron microscope Optoelectronics Substrate (aquarium) Optics Thin film Nanotechnology Composite material Layer (electronics)

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Magnetic properties of thin films

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Theoretical and Computational Physics

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Epitaxial growth of Co/Cu[100] and [111] superlattices via rf sputtering on sapphire (1120)-substrates

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