JOURNAL ARTICLE

Etching Properties of Hydrogenated Amorphous Silicon

Y. S. TsuoYuting XuDavid W. BakerS. K. Deb

Year: 1991 Journal:   MRS Proceedings Vol: 219   Publisher: Cambridge University Press
Keywords:
Materials science Etching (microfabrication) Isopropyl alcohol Dry etching Reactive-ion etching Amorphous solid Chemical engineering Amorphous silicon Isotropic etching Silicon Plasma etching Hydrogen Nanotechnology Optoelectronics Crystalline silicon Organic chemistry Layer (electronics) Chemistry

Metrics

7
Cited By
1.72
FWCI (Field Weighted Citation Impact)
15
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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