JOURNAL ARTICLE
Etching Properties of Hydrogenated Amorphous Silicon
Y. S. TsuoYuting XuDavid W. BakerS. K. Deb
Year: 1991 Journal: MRS Proceedings Vol: 219 Publisher: Cambridge University Press
Keywords:
Materials science Etching (microfabrication) Isopropyl alcohol Dry etching Reactive-ion etching Amorphous solid Chemical engineering Amorphous silicon Isotropic etching Silicon Plasma etching Hydrogen Nanotechnology Optoelectronics Crystalline silicon Organic chemistry Layer (electronics) Chemistry
Metrics
7
Cited By
1.72
FWCI (Field Weighted Citation Impact)
15
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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