High-Q RF-MEMS tunable evanescent-mode cavity filter

Abstract

This paper presents a high-Q tunable evanescent-mode cavity filter using capacitive RF MEMS cantilever switches with a frequency coverage of 5.5-4.3 GHz. The filter results in an insertion loss of 2.6-5.3 dB over the tuning range and a 3-dB bandwidth of 55-40 MHz (fractional bandwidth of %1). The measured Q _u of the filter is 511-273 over the frequency range, which is to our knowledge, the best report Q using RF-MEMS technology.