Structural, electrical and optical properties of Gd doped and undoped ZnO:Al (ZAO) thin films prepared by RF magnetron sputtering

Wei Lin; Ruixin Ma; Wei Shao; Bin Liu

doi:10.1016/j.apsusc.2006.11.032

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Structural, electrical and optical properties of Gd doped and undoped ZnO:Al (ZAO) thin films prepared by RF magnetron sputtering

Wei Lin Ruixin Ma Wei Shao Bin Liu

Year: 2006 Journal: Applied Surface Science Vol: 253 (11)Pages: 5179-5183 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2006.11.032

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Keywords:

Wurtzite crystal structure Materials science Doping Sputter deposition Crystallite Thin film Band gap Transmittance Optoelectronics Sputtering Analytical Chemistry (journal) Nanotechnology Zinc Metallurgy Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Structural, electrical and optical properties of Gd doped and undoped ZnO:Al (ZAO) thin films prepared by RF magnetron sputtering

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