Large Area, High Aspect Ratio Microelectrode Arrays

Charles D. Merritt; Paul Falkenstein; B. L. Justus

doi:10.1557/proc-773-n11.3

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JOURNAL ARTICLE

Large Area, High Aspect Ratio Microelectrode Arrays

Charles D. Merritt Paul Falkenstein B. L. Justus

Year: 2003 Journal: MRS Proceedings Vol: 773 Publisher: Cambridge University Press

DOI: 10.1557/proc-773-n11.3

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Keywords:

Materials science Electrode Microelectrode Wafer Aspect ratio (aeronautics) Fabrication Micrometer Optoelectronics Multielectrode array Nanotechnology Optics

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Topics

Neuroscience and Neural Engineering

Life Sciences → Neuroscience → Cellular and Molecular Neuroscience

Advanced Memory and Neural Computing

Physical Sciences → Engineering → Electrical and Electronic Engineering

Conducting polymers and applications

Physical Sciences → Materials Science → Polymers and Plastics

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