A novel laterally driven micromachined resonant pressure sensor

Abstract

This paper presents the design, fabrication, package and tests of a novel resonant pressure sensor suitable for noncorrosive medium pressure measurements, based on electromagnetically driven and sensed H-type lateral beam resonators and stress isolated package. The resonant beams are exposed to the pressure media rather than working in vacuum. The design of the pressure sensor is optimized by FEA simulation and the fabricated devices show a rather good performance. Over the pressure range 0~120kPa, the resolution is 10Pa, with the nonlinearity lower than 0.03%, hysteresis error less than 0.06%, and the temperature drift is less than 0.05%°C in the range of -40°C to 70°C.