Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering

Xin Wang; Weitao Zheng; Hongwei Tian; Shansheng Yu; Weiqing Xu; Songhe Meng; Xiaoshu He; Jiecai Han; Changqing Sun; Beng Kang Tay

doi:10.1016/s0169-4332(03)00752-9

JOURNAL ARTICLE

Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering

Xin Wang Weitao Zheng Hongwei Tian Shansheng Yu Weiqing Xu Songhe Meng Xiaoshu He Jiecai Han Changqing Sun Beng Kang Tay

Year: 2003 Journal: Applied Surface Science Vol: 220 (1-4)Pages: 30-39 Publisher: Elsevier BV

DOI: 10.1016/s0169-4332(03)00752-9

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Keywords:

X-ray photoelectron spectroscopy Iron nitride Coercivity Materials science Analytical Chemistry (journal) Thin film Sputter deposition Nitride Saturation (graph theory) Surface roughness Sputtering Cavity magnetron Nuclear magnetic resonance Chemistry Condensed matter physics Nanotechnology Composite material Layer (electronics)

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Magnetic properties of thin films

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Growth, structural, and magnetic properties of iron nitride thin films deposited by dc magnetron sputtering

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