Fabrication of diffraction gratings for hard X-ray phase contrast imaging

C. David; J. Bruder; T. Rohbeck; C. Grünzweig; Christian Kottler; Ana Díaz; Oliver Bunk; Franz Pfeiffer

doi:10.1016/j.mee.2007.01.151

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Fabrication of diffraction gratings for hard X-ray phase contrast imaging

C. David J. Bruder T. Rohbeck C. Grünzweig Christian Kottler Ana Díaz Oliver Bunk Franz Pfeiffer

Year: 2007 Journal: Microelectronic Engineering Vol: 84 (5-8)Pages: 1172-1177 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2007.01.151

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Keywords:

Optics Grating Materials science Phase-contrast imaging Fabrication Interferometry Diffraction grating Photolithography X-Ray Phase-Contrast Imaging Phase (matter) Diffraction Micrometer Etching (microfabrication) Optoelectronics Physics Phase contrast microscopy Nanotechnology

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Advanced X-ray Imaging Techniques

Physical Sciences → Physics and Astronomy → Radiation

Crystallography and Radiation Phenomena

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

X-ray Spectroscopy and Fluorescence Analysis

Physical Sciences → Physics and Astronomy → Radiation

Fabrication of diffraction gratings for hard X-ray phase contrast imaging

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