Optical design of micro-optical-electro-mechanical systems

Abstract

The paper is concerned with the design phase of MOEMS. It should, in principle, include three subphases. While they can be considered and performed separately, these phases are interactive and should be performed iteratively. The first phase is optical or functional design. It involves choosing the geometry and optical characteristics (materials) for the MOEMS so that it will perform the desired function. This phase is the focus of the current paper and will be discussed at length below. The primary issue to be addressed is whether or not any of the commercially available optical design codes are useful for the design of MOEMS. If so, can they be used with the other codes needed to design MEMS.