Experimental study of aluminum-induced crystallization of amorphous silicon thin films

Guo-Jun Qi; Sam Zhang; T.T. Tang; Jianfeng Li; Xiao Wei Sun; Xiaofei Zeng

doi:10.1016/j.surfcoat.2004.10.092

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Experimental study of aluminum-induced crystallization of amorphous silicon thin films

Guo-Jun Qi Sam Zhang T.T. Tang Jianfeng Li Xiao Wei Sun Xiaofei Zeng

Year: 2005 Journal: Surface and Coatings Technology Vol: 198 (1-3)Pages: 300-303 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2004.10.092

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Keywords:

Materials science Crystallization Silicon Polycrystalline silicon Amorphous silicon Aluminium Thin film Crystallinity Annealing (glass) Amorphous solid Wafer Chemical vapor deposition Nanocrystalline silicon Crystallite Composite material Metallurgy Crystalline silicon Chemical engineering Nanotechnology Thin-film transistor Crystallography

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Experimental study of aluminum-induced crystallization of amorphous silicon thin films

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