Ambipolar Thin-Film Transistors Fabricated by PECVD Nanocrystalline Silicon

Czang-Ho Lee; Andrei Sazonov; Mohammad Reza Esmaeili Rad; G. Reza Chaji; Arokia Nathan

doi:10.1557/proc-0910-a22-05

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Ambipolar Thin-Film Transistors Fabricated by PECVD Nanocrystalline Silicon

Czang-Ho Lee Andrei Sazonov Mohammad Reza Esmaeili Rad G. Reza Chaji Arokia Nathan

Year: 2006 Journal: MRS Proceedings Vol: 910 Publisher: Cambridge University Press

DOI: 10.1557/proc-0910-a22-05

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Keywords:

Materials science Ambipolar diffusion Thin-film transistor Optoelectronics Plasma-enhanced chemical vapor deposition Subthreshold slope Transistor Electron mobility Threshold voltage Silicon Nanotechnology Electrical engineering Electron Layer (electronics) Voltage

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Ambipolar Thin-Film Transistors Fabricated by PECVD Nanocrystalline Silicon

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