JOURNAL ARTICLE

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance

Keywords:
Passivation Materials science Capacitive micromachined ultrasonic transducers Parylene Ultrasonic sensor Microelectromechanical systems Capacitive sensing Layer (electronics) Optoelectronics Transducer Miniaturization Composite material Electronic engineering Piezoelectricity Acoustics Nanotechnology Electrical engineering Engineering

Metrics

6
Cited By
0.31
FWCI (Field Weighted Citation Impact)
9
Refs
0.65
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

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