Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance

Edgard Jeanne; Cyril Meynier; F. Teston; Dominique Certon; Nicolas Félix; Mathieu Roy; Daniel Alquier

doi:10.1557/proc-1052-dd06-27

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Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance

Edgard Jeanne Cyril Meynier F. Teston Dominique Certon Nicolas Félix Mathieu Roy Daniel Alquier

Year: 2007 Journal: MRS Proceedings Vol: 1052 Publisher: Cambridge University Press

DOI: 10.1557/proc-1052-dd06-27

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Keywords:

Passivation Materials science Capacitive micromachined ultrasonic transducers Parylene Ultrasonic sensor Microelectromechanical systems Capacitive sensing Layer (electronics) Optoelectronics Transducer Miniaturization Composite material Electronic engineering Piezoelectricity Acoustics Nanotechnology Electrical engineering Engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance

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