JOURNAL ARTICLE
Auger Electron Spectroscopy of Metallic Film/Laser-Irradiated Alumina Couples
Jaewon ParkAnthony J. PedrazaWilliam R. Allen
Year: 1994 Journal: MRS Proceedings Vol: 357 Publisher: Cambridge University Press
Keywords:
Materials science Auger electron spectroscopy Substrate (aquarium) Irradiation Sputtering Argon Analytical Chemistry (journal) Oxide Copper Oxygen Thin film Metallurgy Nanotechnology Atomic physics Chemistry
Metrics
2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
8
Refs
0.22
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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