JOURNAL ARTICLE

Auger Electron Spectroscopy of Metallic Film/Laser-Irradiated Alumina Couples

Jaewon ParkAnthony J. PedrazaWilliam R. Allen

Year: 1994 Journal:   MRS Proceedings Vol: 357   Publisher: Cambridge University Press
Keywords:
Materials science Auger electron spectroscopy Substrate (aquarium) Irradiation Sputtering Argon Analytical Chemistry (journal) Oxide Copper Oxygen Thin film Metallurgy Nanotechnology Atomic physics Chemistry

Metrics

2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
8
Refs
0.22
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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