Amorphous InZnO's (a-IZO) basic PV applicability has now been demonstrated in prototype CIGS, Si Heterojunction (SiHJ) and organic photovoltaics (OPV). However, to move beyond initial demonstration devices, improved TCO properties and processibility of the a-IZO films are needed. Here, RF-superimposed DC sputtering was used to improve the reliable deposition of a-IZO with conductivity > 3000 S/cm.
Ju-Il SongJae-Soung ParkKim HowoonYoung-Woo HeoJoon‐Hyung LeeJeong-Joo KimG. M. KimByeong Dae Choi
Manan S. GroverPeter HershHai Q. ChiangE. S. KettenringJohn F. WagerDouglas A. Keszler
Jun-Yi LiSheng-Po ChangWen-Chen HuaShoou‐Jinn Chang
Mallory MativengaMin Hyuk ChoiJae Won ChoiJin Jang
Chaun Gi ChoiSeok‐Jun SeoByeong‐Soo Bae