MEMS tunable resonant leaky mode filters

Abstract

A tunable double-grating resonant leaky mode microelectromechanical-type element is introduced. A significant level of tunability is demonstrated by adjusting mechanically the structural symmetry of the grating profile. Tuning is also possible by variation of the thickness of the resonant layer. For a particular example silicon-on-insulator structure treated, it is shown that the resonance wavelength can be shifted by /spl sim/300 nm with a horizontal movement of /spl sim/120 nm within the 1.4-1.7-μm wavelength band. Additionally, the reflectance can be varied from /spl sim/10/sup -3/ to 1 at central wavelength of 1.55 μm with a vertical movement of /spl sim/200 nm. These results demonstrate new possibilities in design of tunable optical devices.