Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films

J. R. Montague; Mark J. Dalberth; Jason M. Gray; Dragos Seghete; Kris A. Bertness; Steven M. George; Victor M. Bright; Charles T. Rogers; Norman A. Sanford

doi:10.1016/j.sna.2010.03.014

JOURNAL ARTICLE

Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films

J. R. Montague Mark J. Dalberth Jason M. Gray Dragos Seghete Kris A. Bertness Steven M. George Victor M. Bright Charles T. Rogers Norman A. Sanford

Year: 2010 Journal: Sensors and Actuators A Physical Vol: 165 (1)Pages: 59-65 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2010.03.014

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Keywords:

Atomic layer deposition Conformal coating Materials science Nanowire Gallium nitride Gallium Nitride Resonator Thin film Optoelectronics Resonance (particle physics) Stiffening Coating Nanotechnology Layer (electronics) Composite material Metallurgy Physics Atomic physics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films

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