Tapered piezoelectric bimorph actuator is analyzed. An exponential function describing the tapered line is adopted to solve the wave equation. The characteristics change with the shape of the actuator is analyzed theoretically. Exponentially tapered piezoelectric bimorphs are fabricated to verify the theoretical results. It shows that the analytical model is useful for optimum design of the actuator.
Jungsoon KimMoojoon KimHuiuk LeeKanglyel Ha
Jungsoon KimKanglyeol HaMoojoon Kim
Jungsoon KimKanglyeol HaMoojoon Kim
Shuto KawakitaToshiki IsogaiNobuyuki OhyaN. Kawahara
Yoshiaki FudaMinoru MurataYashuyuki Matsuo