Characterization Of A Microwave Cavity Plasma Reactor Under Large Area Diamond Film Deposition Conditions

Abstract

This paper experimentally investigates the operating characteristics of the microwave cavity plasma reactor under diamond film deposition conditions. A detailed description of this reactor will be presented. The input experimental variables are: (1) absorbed microwave power (2--3 kW), (2) operating pressure (40--60 Torr), (3) receive gas composition (H{sub 2}/CH{sub 4}/CO{sub 2}), and (4) total gas flow rates (50--400 sccm). Substrate temperature and discharge volume are important internal experimental parameters. Substrate temperature affects the diamond film growth rate and morphology. Discharge volume affects the diamond film deposition area and uniformity. The variations of substrate temperature and discharge volume versus the input experimental variables will be discussed. The experimental output parameters are: (1) diamond film linear growth rate ({mu}m/hour), (2) weight gain rate (mg/hour), (3) carbon conversion efficiency (%), and (4) gas flow efficiency (mg/liter). The experimental dependence of the output experimental parameters on the input experimental variables will be presented.