Vapor Sensing by Means of a ZnO-on-Si Surface Acoustic Wave Resonator

Abstract

bient gas phase. Previous work employing SAW delay lines fabricated on quartz or Surface Acoustic Wave (SAW) devices can LiNb03 in conjunction with a chemically function as sensitive detectors of vapors. sensitive overlay have demonstrated gas The high surface acoustic energy density OK vapor sensitivity [l-31. of the device makes it extremely sensitive to the presence of molecules adsorbed from In this paper we discuss the first use of the gas phase. Mass loading by the adsora ZnO-on-Si SAW resonator as a gas sensor. bate is the primary mechanism €OK the SUK- In particular, the sensitivity of the face wave velocity perturbation. If the device to organic vapors is examined. The