Co,Ni-base alloy thin films deposited by reactive radio frequency magnetron sputtering

Abstract

Structural properties and mechanical behavior of Co,Ni-base alloy thin films deposited by reactive rf magnetron sputtering on a tool steel were compared with those of TiN or TiN/Ti two-layer coatings produced by the same technology. Reactive sputtering of the Co,Ni-base alloy in Ar+N2 atmosphere results in the production of amorphous (or nanocrystalline) thin films with interesting properties: (a) high hardness (2000 HV), (b) low friction coefficient (0.06), and (c) absence of acoustic emission and no delamination after scratch test up to a load of 60 N. The strong adhesion to the steel substrate is directly connected with the plastic behavior of these thin films, which is a rather unusual feature for hard, low-friction nitride coatings.