Tribological and mechanical properties of physical vapor deposited alpha alumina thin film coating

Aditya Aryasomayajula; Nicholas X. Randall; Matt Gordon; Deepak Bhat

doi:10.1016/j.tsf.2008.06.019

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Tribological and mechanical properties of physical vapor deposited alpha alumina thin film coating

Aditya Aryasomayajula Nicholas X. Randall Matt Gordon Deepak Bhat

Year: 2008 Journal: Thin Solid Films Vol: 517 (2)Pages: 819-823 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2008.06.019

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Keywords:

Materials science Tribology Scratch Coating Composite material Physical vapor deposition Thin film Partial pressure Sputter deposition Sputtering Oxygen Nanotechnology

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Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Tribology and Wear Analysis

Physical Sciences → Engineering → Mechanics of Materials

Tribological and mechanical properties of physical vapor deposited alpha alumina thin film coating

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