SnO2 sol–gel derived thin films for integrated gas sensors

C. Cobianu; Cristian Savaniu; Pietro Siciliano; S. Capone; Mikko Utriainen; Lauri Niinistö

doi:10.1016/s0925-4005(01)00755-9

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SnO2 sol–gel derived thin films for integrated gas sensors

C. Cobianu Cristian Savaniu Pietro Siciliano S. Capone Mikko Utriainen Lauri Niinistö

Year: 2001 Journal: Sensors and Actuators B Chemical Vol: 77 (1-2)Pages: 496-502 Publisher: Elsevier BV

DOI: 10.1016/s0925-4005(01)00755-9

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Keywords:

Materials science Thin film Sol-gel Silicon Oxidizing agent Polycrystalline silicon Crystallite Microelectronics Etching (microfabrication) Layer (electronics) Nanotechnology Optoelectronics Chemical engineering Metallurgy Chemistry

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

SnO2 sol–gel derived thin films for integrated gas sensors

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