Photoacoustic measurement of thermal properties of TiN thin films

A. Albert Irudayaraj; R. Srinivasan; P. Kuppusami; E. Mohandas; S. Kalainathan; R. Saravanan

doi:10.1007/s10853-007-2248-8

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Photoacoustic measurement of thermal properties of TiN thin films

A. Albert Irudayaraj R. Srinivasan P. Kuppusami E. Mohandas S. Kalainathan R. Saravanan

Year: 2007 Journal: Journal of Materials Science Vol: 43 (3)Pages: 1114-1120 Publisher: Springer Science+Business Media

DOI: 10.1007/s10853-007-2248-8

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Keywords:

Materials science Thin film Tin Titanium nitride Thermal diffusivity Substrate (aquarium) Grain size Microstructure Composite material Sputtering Thermal conductivity Sputter deposition Analytical Chemistry (journal) Nitride Metallurgy Layer (electronics) Nanotechnology Thermodynamics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Photoacoustic measurement of thermal properties of TiN thin films

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