Heterogeneous metal-oxide nanowire micro-sensor array for gas sensing

Abstract

Vanadium oxide, manganese oxide, tungsten oxide, and nickel oxide nanowires were investigated for their applicability as chemiresistive gas sensors. Nanowires have excellent surface-to-volume ratios which yield higher sensitivities than bulk materials. Sensing elements consisting of these materials were assembled in an array to create an electronic nose platform. Dielectrophoresis was used to position the nanomaterials onto a microfabricated array of electrodes, which was subsequently mounted onto a leadless chip carrier and printed circuit board for rapid testing. Samples were tested in an enclosed chamber with vapors of acetone, isopropanol, methanol, and aqueous ammonia. The change in resistance of each assembly was measured. Responses varied between nanowire compositions, each demonstrating unique and repeatable responses to different gases; this enabled direct detection of the gases from the ensemble response. Sensitivities were calculated based on the fractional resistance change in a saturated environment and ranged from 6 × 10−4 to 2 × 10−5%change ppm−1.