JOURNAL ARTICLE

Development of UV-LIGA integrated vibrometer using 3×3 directional coupler

N. AdamovicA. Vujanić

Year: 2007 Journal:   Microelectronic Engineering Vol: 84 (5-8)Pages: 1325-1328   Publisher: Elsevier BV
Keywords:
LIGA Miniaturization Fabrication Laser Doppler vibrometer Microsystem Microphone Computer science Acoustics Materials science Optics Nanotechnology Physics Telecommunications Laser

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Citation History

Topics

Semiconductor Lasers and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Optical Coherence Tomography Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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