Development of UV-LIGA integrated vibrometer using 3×3 directional coupler

N. Adamovic; A. Vujanić

doi:10.1016/j.mee.2007.01.180

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Development of UV-LIGA integrated vibrometer using 3×3 directional coupler

N. Adamovic A. Vujanić

Year: 2007 Journal: Microelectronic Engineering Vol: 84 (5-8)Pages: 1325-1328 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2007.01.180

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Keywords:

LIGA Miniaturization Fabrication Laser Doppler vibrometer Microsystem Microphone Computer science Acoustics Materials science Optics Nanotechnology Physics Telecommunications Laser

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Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coherence Tomography Applications

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Development of UV-LIGA integrated vibrometer using 3×3 directional coupler

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