JOURNAL ARTICLE

<title>Diffractive optical elements with polarization multiplexing</title>

Uwe D. ZeitnerBernd SchnabelErnst‐Bernhard KleyFrank Wyrowski

Year: 1997 Journal:   Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 3099 Pages: 189-194   Publisher: SPIE

Abstract

In this paper a method is introduced which makes it possible to choose the paraxial field distribution generated by a diffractive element independently for two perpendicular polarization directions. For that the local transmission of a binary element is controlled by metal-stripe subwavelength gratings of different grating directions fabricated by electron beam lithography. The method based upon the property of these gratings to influence the intensity of an incident wave dependent on their polarization direction. In first experiments such diffractive amplitude elements have been fabricated successfully with the electron beam lithography system LION LV1.

Keywords:
Electron-beam lithography Optics Polarization (electrochemistry) Grating Lithography Diffraction efficiency Perpendicular Materials science Diffraction grating Physics Diffraction Optoelectronics Cathode ray Amplitude Electron Resist Nanotechnology

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0.73
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0.70
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Topics

Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Advanced optical system design
Physical Sciences →  Engineering →  Biomedical Engineering
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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